WBB-2000

Up to 12 inches
The WBB-2000 large-area wafer-level bonder features a suspended bonding head structure that can be applied wafers of up to 12 inches.

Features

  • Capable of bonding large products, contributing to improved tact time.
  • Connectivity and readiness for Industry 4.0
  • Real-time and all-time bonding position correction by temperature sensors.
  • A time of recipe programming is 40%* shorter than previous models.
  • *Depends on a formation and number of bump.

Specifications

Bonding Bonding accuracy 3σ≤±3.5µm
Bonding area 360mm×360mm
Productivity Bonding time 28ms
Compatible wafer size   Up to 12 in
Others Overall dimensions W1,100×D1,300×H1,840mm
Weight 1,200kg
Further specifications can be found in the brochure. (PDF file download)
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