KAIJO SPOT SHOWER

KAIJO SPOT SHOWER
For Photovoltaic, FPD and HDD media precise cleaning process!

430kHz/950kHz

・950kHz and 430 kHz models are manufacturable.
・Suitable for single wafer cleaning
・Suitable for the cleaning of Semiconductor Wafer, LCD and HDD media
・Cleaning solution with megasonic energy

Features

  • Communicating with host PC
  • Remote output power control
  • Output power level in 0.1w increments
  • Output power meter, 4-digit display
  • Programmable soft-start function
  • No field calibration needed when replacing a generator or transducer
  • Supply voltage range from 100VAC to 240VAC

Specifications(Generator)

Uniform damage less cleaning to fine patterns
High efficiency cleaning by our unique transducer design

※You can see the entire table by scrolling.

Generator model 30110
Max output power 100W
Mini. output power 1W
Output adjustable intervals 0.1W
Frequency 430kHz、950kHz 2MHz、3MHz
Frequency control Automatic tracking PLL system
Power source AC100-24V+-10% Single phase 50/60Hz
Power consumption 500VA
Output display 7-segment digital display in 4-digits
Accessories Remote terminal, External output control, Abnormal output terminal, Analog output terminal(4-20mA), Forced outage terminal
Alarms Abnormal output alarm, Transducer error alarm, Abnormal heat alarm
Outer dimentions(WxDxHmm) 218x258x138
Weight 5kg

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KAIJO SPOT SHOWER

KAIJO SPOT SHOWER

Cleaning solution with megasonic energy is jetted from the nozzle.
Suitable for the cleaning of Semiconductor Wafer, LCD and HDD media

KAIJO W SPOT SHOWER

KAIJO W SPOT SHOWER

Cleaning solution with megasonic energy is simultaneously jetted from two active nozzles to clean both side of HDD media.

・High efficiency cleaning by our unique transducer design
・Megasonic energy from two nozzles but utilizing one generator

KAIJO SPOT SHOWER

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Transducer model 27SS 17SS 28SS
Max. output power 50W 20W 30W
Generator model 30110 20W
Frequency 430kHz 950kHz
Housing material PEEK,PCTFE
Plate material Ta
Ambient temperature 10-40
Liquid consumption 2.0-3.0L/min 1-1.5L/min
Outer dimensions(mm) 57(diameter)x90(H) 36(diameter)x71(H)

※You can see the entire table by scrolling.

KAIJO W SPOT SHOWER

※You can see the entire table by scrolling.

Generator Model 27QD 28QD
Max. output power 20W×2 30W×2
Generator model 30110
Frequency 430kHz 950kHz
Housing material PEEK
Plate material Ta
Ambient temperature 10~40℃
Liquid consumption 3-4L/min 2-3L/min
Outer dimensions(mm) 84(W)×32(D)×59(H)

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