KAIJO SPOT SHOWER
- For Photovoltaic, FPD and HDD media precise cleaning process!
430kHz/950kHz
- ・950kHz and 430 kHz models are manufacturable.
・Suitable for single wafer cleaning
・Suitable for the cleaning of Semiconductor Wafer, LCD and HDD media
・Cleaning solution with megasonic energy
Features
- Communicating with host PC
- Remote output power control
- Output power level in 0.1w increments
- Output power meter, 4-digit display
- Programmable soft-start function
- No field calibration needed when replacing a generator or transducer
- Supply voltage range from 100VAC to 240VAC
Specifications(Generator)
Uniform damage less cleaning to fine patterns
High efficiency cleaning by our unique transducer design
※You can see the entire table by scrolling.
| Generator model | 30110 | |
|---|---|---|
| Max output power | 100W | |
| Mini. output power | 1W | |
| Output adjustable intervals | 0.1W | |
| Frequency | 430kHz、950kHz | 2MHz、3MHz |
| Frequency control | Automatic tracking PLL system | |
| Power source | AC100-24V+-10% Single phase 50/60Hz | |
| Power consumption | 500VA | |
| Output display | 7-segment digital display in 4-digits | |
| Accessories | Remote terminal, External output control, Abnormal output terminal, Analog output terminal(4-20mA), Forced outage terminal | |
| Alarms | Abnormal output alarm, Transducer error alarm, Abnormal heat alarm | |
| Outer dimentions(WxDxHmm) | 218x258x138 | |
| Weight | 5kg | |
※You can see the entire table by scrolling.
KAIJO SPOT SHOWER
Cleaning solution with megasonic energy is jetted from the nozzle.
Suitable for the cleaning of Semiconductor Wafer, LCD and HDD media
KAIJO W SPOT SHOWER
Cleaning solution with megasonic energy is simultaneously jetted from two active nozzles to clean both side of HDD media.
・High efficiency cleaning by our unique transducer design
・Megasonic energy from two nozzles but utilizing one generator
KAIJO SPOT SHOWER
※You can see the entire table by scrolling.
| Transducer model | 27SS | 17SS | 28SS | |||
|---|---|---|---|---|---|---|
| Max. output power | 50W | 20W | 30W | |||
| Generator model | 30110 | 20W | ||||
| Frequency | 430kHz | 950kHz | ||||
| Housing material | PEEK,PCTFE | |||||
| Plate material | Ta | |||||
| Ambient temperature | 10-40 | |||||
| Liquid consumption | 2.0-3.0L/min | 1-1.5L/min | ||||
| Outer dimensions(mm) | 57(diameter)x90(H) | 36(diameter)x71(H) | ||||
※You can see the entire table by scrolling.
KAIJO W SPOT SHOWER
※You can see the entire table by scrolling.
| Generator Model | 27QD | 28QD |
|---|---|---|
| Max. output power | 20W×2 | 30W×2 |
| Generator model | 30110 | |
| Frequency | 430kHz | 950kHz |
| Housing material | PEEK | |
| Plate material | Ta | |
| Ambient temperature | 10～40℃ | |
| Liquid consumption | 3-4L/min | 2-3L/min |
| Outer dimensions(mm) | 84（W)×32(D)×59(H) | |
※You can see the entire table by scrolling.
- Contact InformationInquiries about products
- Please contact us for technical inquiries and technical information from here.