High Frequency Ultrasonic Cleaning
- Megasonic Clearing (HI MEGASONIC)
- Suitable for precise cleaning of Si Wafer, GaAS, liquid crystal glass, glass mask, HDD, crystal transducer, thin-film magnetic head, brittle materials and etc.
| 750kHz／950kHz |
Purpoes
- Megasonic cleaner is high frequency ultrasonic cleaner for precise cleaning and suitable for high level cleaning requirements of silicon wafer, flat panel, HDD field that removing ultrafine particles.
- High frequency (750kHz, 950kHz) megasonic cleaning removes particles by acceleration to realize uniform cleaning and less damages.
Features(Generator)
- 0.1W power setting available. Easy cleaning control for less-damage cleaning.
- Wide range of supply power voltage:AC200~240V +/-10% 50/60Hz
- Max potput power:1200W for large area cleaning.
Specifications (Generator)
※You can see the entire table by scrolling.
| Generator model | 70110 | |
|---|---|---|
| Maximum output power | 1200W | |
| Frequency | Frequency is decided by transducer to be used. | |
| Irradiation Mode | PLL mode/INT mode/A mode/B mode | |
| Power soucel | Current | 10A |
| Voltage | AC200V-AC240V(+-10% 1(diameter) 50/60Hz) | |
| Outer dimentions | 430（W) ×418（D) ×148（H) | |
| Weight | 17kg | |
| Functions | Remote mode | |
| Output setting of 8 types | ||
| RS485 communication | ||
| Abnormal output terminal | ||
| Analog output terminal （Output monitoring） | ||
| 0-5V(standard）or 4-20ｍA selectable | ||
※You can see the entire table by scrolling.
Features (Transducer plate)
- Large size P.Z.T. elements are used for stable cleaning uniformity.
- High watt density for effective cleaning performance
(Max.: Aprox. 5.4W/cm2) - Thick transducer plate is used to realize great mechanical strength and longer operating life in order to be installed to cleaning tank comfortably.
- Almost no acoustic transmission loss and high efficiency.
- Only a few seams of elements for the best effective cleaning
- Available material is SU304, 316, 316L.
Specifications (Transducer)
※You can see the entire table by scrolling.
| Wafer size | Transducer plate modele for 6" wafer | Transducer plate modele for 8" wafer | Transducer plate modele for 12" wafer |
|---|---|---|---|
| Model | 7857S | 8857S | 98SL |
| Maximum input power | 300Wx4 | 300Wx6 | 300Wx16 |
| Frequency | 950kHz | 950kHz | 750kHz |
| Effective area(mm) | 136x163 | 165x215 | 275x319 |
| Plate material | SU316L | SU316L | SU316L |
| Transducer elements | PZT | PZT | PZT |
| Heat-resistant temperature | 70℃ | 70℃ | 70℃ |
| Outer dimendions (WxDxHmm) |
185x215x55 | 255x305x55 | 410x340x65 |
| Installation | Bolt fixation | Bolt fixation | Bolt fixation |
※You can see the entire table by scrolling.
Features (Cleaning bath)
- Kaijo commercialize ultrasonic cleaning quartz tank on which the elelments donded direcly.
More than 1.2 times powerful irradiation avaialble compared to the former dual tank type. This is one of Kaijo's unique technique. - Available for the cleaning solution temperature from room temperature (up to 50℃) to high temperature (up ot 80℃) .
- We can also fablicate stainless tank.
- Contact InformationInquiries about products
- Please contact us for technical inquiries and technical information from here.