MEGATUBE

MEGATUBE
For Photovoltaic,FPD and HDD media precise cleaning process!
430kHz/950kHz
・950kHz and 430 kHz models are manufacturable.
・Suitable for single wafer cleaning
・Suitable for the cleaning of Semiconductor Wafer, LCD and HDD media
・Cleaning solution with megasonic energy is jetted from the nozzle.

Features

  • Communicating with host PC
  • Remote output power control
  • Output power level in 0.1w increments
  • Output power meter, 4-digit display
  • Programmable soft-start function
  • No field calibration needed when replacing a generator or transducer
  • Supply voltage range from 100VAC to 240VAC

Specifications(Generator)

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Generator model 30110
Max output power 100W
Mini. output power 1W
Output adjustable intervals 0.1W
Frequency 430kHz、950kHz
Frequency control Automatic tracking PLL system
Power source AC100-24V+-10% Single phase 50/60Hz
Power consumption 500VA
Output display 7-segment digital display in 4-digits
Accessories Remote terminal, External output control, Abnormal output terminal, Analog output terminal(4-20mA), Forced outage terminal
Alarms Abnormal output alarm, Transducer error alarm, Abnormal heat alarm
Outer dimentions(WxDxHmm) 218x258x138
Weight 5kg

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MEGATUBE

MEGATUBE

Three insonification methods are availalble; tube type, shower type, tube sidewall type.

The tube nozzle allows a user to direct megasonic energy to tight space without the need for transducer clearance.

Specifications

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Transducer model 27MT 17MT 28MT
Max. output power 50W 20W 30W
Generator model 30110
Frequency 430kHz 950kHz
Housing material PEEK,PCTFE
Plate material Ta
Ambient temperature 10~40℃
Liquid consumption 2.5-3.5 L/min 1.0-1.5 L/min
Outer dimensions(mm) Φ57×90(H) Φ36×71(H)

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