MEGATUBE
- For Photovoltaic,FPD and HDD media precise cleaning process!
430kHz/950kHz - ・950kHz and 430 kHz models are manufacturable.
・Suitable for single wafer cleaning
・Suitable for the cleaning of Semiconductor Wafer, LCD and HDD media
・Cleaning solution with megasonic energy is jetted from the nozzle.
Features
- Communicating with host PC
- Remote output power control
- Output power level in 0.1w increments
- Output power meter, 4-digit display
- Programmable soft-start function
- No field calibration needed when replacing a generator or transducer
- Supply voltage range from 100VAC to 240VAC
Specifications(Generator)
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| Generator model | 30110 |
|---|---|
| Max output power | 100W |
| Mini. output power | 1W |
| Output adjustable intervals | 0.1W |
| Frequency | 430kHz、950kHz |
| Frequency control | Automatic tracking PLL system |
| Power source | AC100-24V+-10% Single phase 50/60Hz |
| Power consumption | 500VA |
| Output display | 7-segment digital display in 4-digits |
| Accessories | Remote terminal, External output control, Abnormal output terminal, Analog output terminal(4-20mA), Forced outage terminal |
| Alarms | Abnormal output alarm, Transducer error alarm, Abnormal heat alarm |
| Outer dimentions(WxDxHmm) | 218x258x138 |
| Weight | 5kg |
※You can see the entire table by scrolling.
MEGATUBE
Three insonification methods are availalble; tube type, shower type, tube sidewall type.
The tube nozzle allows a user to direct megasonic energy to tight space without the need for transducer clearance.
Specifications
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| Transducer model | 27MT | 17MT | 28MT |
|---|---|---|---|
| Max. output power | 50W | 20W | 30W |
| Generator model | 30110 | ||
| Frequency | 430kHz | 950kHz | |
| Housing material | PEEK,PCTFE | ||
| Plate material | Ta | ||
| Ambient temperature | 10～40℃ | ||
| Liquid consumption | 2.5-3.5 L/min | 1.0-1.5 L/min | |
| Outer dimensions(mm) | Φ57×90（H) | Φ36×71(H) | |
※You can see the entire table by scrolling.
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